Mary has over 25 years of microfabrication experience with a broad range of microelectronics, including MEMS (sensors, optical switches, waveguides, fluidics) semiconductors (CMOS, DMOS, Bipolar), and flat panel display (field emission, micro-mirror, liquid crystal, elastomeric) devices. Her background spans the full spectrum of fully automated, high volume manufacturing (Three-Five Systems, Allegro Microsystems) to research and development (Honeywell, Raytheon, Cornell University). Having worked in three prior start-up organizations, Mary was the technical lead for bringing on line the MEMS Fab at Infotonics Technology Center, a New York Center of Excellence. She was responsible for the on-going operations of that facility for 3 additional years. Mary earned a Bachelor of Science degree from the University of Wisconsin and is a Certified Project Management Professional (PMI).
Mark Boysel, PhD., CTO
Mark has worked in the field of MEMS and microfabrication for over 24 years. He received his Ph. D. degree in Experimental Low Temperature Condensed Matter Physics from The Ohio State University in 1981. He held post-doctoral positions at Imperial College in London, and at the University of California, Santa Barbara, where he worked respectively on the low temperature transport properties of novel inhomogeneous superconductors and conducting polymers. From 1985-1995 Dr. Boysel worked at Texas Instruments’ Central Research Laboratories where he helped develop TI’s DLP (Digital Light Processing) technology used in projection televisions and in conference room and theater projectors. At TI Mark was also principal investigator on the development of numerous MEMS devices including optical fiber crossbar switches, coherent optical filters, optical waveguides and waveguide switches, and an uncooled infrared imager. Since 1995 he has worked in four start-up efforts (eMagin, Motorola Flat Panel, and Solus Microtechnologies) to develop otherdisplay technologies including field emission displays, microshutter displays, and electron beam addressed elastomeric displays, and at Virtus Advanced Sensors on MEMS inertial sensors.
Previously, Dr. Boysel was the Chief MEMS Scientist at the Infotonics Technology Center, a Microsystems development and fabrication center. At Infotonics Mark led the early design of and process development for of AlN-based piezoelectric energy harvester for an ARL funded project. At Infotonics his other responsibilities ranged from participating in the design and buildout of the MEMS fab, to interfacing with customers on the design and fabrication of their MEMS projects, to business development, quote generation, and project management. At Infotonics Dr. Boysel was intimately involved with a wide range of MEMS devices and technologies, including silicon and silica planar light circuits, silicon microfluidic chips (ink jet printers and DNA amplifiers), electrostatic and piezoelectric energy harvesters, silicon MEMS mirrors, tunable Fabry Perot etalons, and microneedle-based medical test equipment. Mark also previously managed the Surface Science and Nanotechnology Group in the Fundamental Research Division of Corning, Inc. In this capacity he oversaw many diverse projects including micro-fuel cells, catalytic desulfurization of hydrocarbons, label-free biomolecular assays, and LCD-based optical switches. Dr. Boysel is named on 42 US and European patents in MEMS and microoptics devices and processes.
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